If apache won't start and you see the followin error in your error.log: Apache Error: (28)No space left on device Check if there is enough diskspace available (df -h) also check inode block size (df -i). If you are sure there is enough diskspace available apache probably won't start because there are lots of semaphore-arrays owned by the apache user. Check this using: ipcs -s | grep apache You can remove this using the followin command: ipcs -s | grep apache | perl -e 'while () {@a=split(/\s+/); print `ipcrm sem $a[1]`}'